Spares

Our inventory includes parts for SpeedFAM CMPV and Auriga/AurigaC family; IPEC 372, 472, 676, 776; and the Lam Teres. Our years of experience working with these tools assures that you will be getting the right part the first time. Our Engineering Department provides alternatves for obsolete parts to fulfill the requirements of the application. We only sell OEM-quality parts to supply you with the best parts available. We also offer lower cost alternatives to some process related parts. We work closely with our suppliers to always get the best price possible which we pass on to you. Let use know your needs and we'll show you how we can help.

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Supported Tools

• E & H, upgrades for TEL ® Systems
• IPEC / Speedfam Spareparts
• Shinhan, diamond disk, pad conditioner
• IPEC/Speedfam, Auriga, 372, 472 and 676
• SVG ®, spareparts and systems
• RIOC ™ Legacy Equipment Control and Monitoring System
• Bellows: AMAT ®, Novellus ®
• Ceramic Parts: AMAT ®, Novellus ®
• Ascent'tec Europe special wafer cleaning
• IGAM ®, multizone head
• Stangl ®
• CDS, CCS, slurry systems
• Post CMP cleaner parts
• Semplastics ®, retaining rings
• Varian ™
  
  

Semiconductor Services:

Refurbished Tools
Robot Refurbishment
Legacy Tool Support
Process Support
Spares