Microprocess™ Wet Spin Processing Equipment

Spin Rinser Dryer (SRD)

• Stacked or Stand-alone Configuration
• All stainless steel cabinetry
• “Contact-Less” Modular Nitrogen Heating Unit
• Full coverage bowl heater wrap for uniform heating, and faster and more consistent bowl drying
• Brushless DC drive motor available for particle minimization
• Fully enclosed drain box located inside the unit
• New electro-magnetic rotor stop positioning (RSP) hardware for lower maintenance and higher reliability
• Supports 100mm thru 200mm wafers utilizing the rotor design of your choice
• Accepts Verteq and Semitool 4-Bolt and Quick-Disconnect rotors