Semplastics™ CMP Wear Rings

Features

• Documented reduced wear rate
• Ring's plastic material optimized to your CMP process for lowest Cost of Ownership
• Reduced carrier rebuilds (up to 2.5x ring lifespan)
• Traceable Quality Control for maximum uniformity and process predictability
• Ten Times better tolerance than typical machine shop
• Lowest wear rate for copper and tungsten processes

Success Stories

• Eliminated Speedfam CMP V ring wafer breakage issue for tungsten CMP
• Reduced edge wear on Ebara platform by 8X over OEM
ring
• Improved CoO of Strasbaugh rings by 66% over previous
second source supplier
• Delivered a 2.5X improvement in ring life on IPEC 472 platform over OEM solution

Applicable Equipment

• AMAT
• IPEC
• Ebara
• Speedfam CMP-V and Auriga
• Others: Contact Us

Overview

• Semplastics offers a unique combination of 20 company years of plastics manufacturing experience. Their CMP retaining rings are world renowned for having the tightest precision tolerances in the industry. The flatness and parallelism of these retaining rings greatly helps meet stringent CMP processing specifications.
  In addition, Semplastics' CMP abrasion testing has identified proprietary plastic formulations that extend ring life for specific CMP processes. C-10 is Semplastics' newest proprietary formulation which offers the lowest wear rate for copper and tungsten processes over all other commonly used plastics.